Handbook of physical vapor deposition (PVD) processing
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This book covers all aspects of Physical Vapor Deposition (PVD) process technology, from the characterization and preparation of the substrate material to post deposition processing. It emphasizes the aspects of the process flow critical to economical deposition of films that …
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This book covers all aspects of Physical Vapor Deposition (PVD) process technology, from the characterization and preparation of the substrate material to post deposition processing. It emphasizes the aspects of the process flow critical to economical deposition of films that can meet the required performance specifications.
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"This book covers all aspects of Physical Vapor Deposition (PVD) process technology, from the characterization and preparation of the substrate material to post deposition processing. It emphasizes the aspects of …"
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